Titanium disilicide formation by wide‐area electron beam irradiation
نویسندگان
چکیده
منابع مشابه
Electron Beam Irradiation Applications
The irradiation of materials with electron beams or X rays is used extensively to enhance or modify their physical, chemical or biological properties. These electron beam “irradiators” cover a very wide range of accelerators technology, beam current and energies to produce a wide variety of products, mostly with polymers. They also are used for curing ink, coatings, and adhesives as well as for...
متن کاملSelective deposition of titanium disilicide
The titanium silicide thin films had been formed on Si substrate by reacting of TiX4 (X=Cl, Br) with Si under different experimental conditions. The Si consumption and the titanium silicide obtains were calculated by the film thickness. In some reactions, titanium silicide thin film was found not only on the Si substrates but also on the SiO2 wall at the outlet of the reaction chamber. The quan...
متن کاملNondestructive detection of titanium disilicide phase transformation by picosecond ultrasonics
We demonstrate that picosecond ultrasonics is a sensitive nondestructive probe of the formation of TiSi, from the reaction of titanium films on silicon annealed at temperatures of 300-800 “C. From the measured change in optical reflectivity, the responses due to electronic excitation, acoustic echoes, and thermal coupling to the underlying Si are resolved. The results show significant differenc...
متن کاملTreatment of Synthetic Textile Wastewater by Combination of Coagulation/Flocculation Process and Electron Beam Irradiation
Introduction: Textile wastewaters from dyeing and finishing processes are heavily polluted with dyes, textile auxiliaries and chemicals and have a broad range of pH, high COD concentration and suspended particles. In this study, the efficiency of color and turbidity removal from synthetic textile wastewater samples were investigated by combined process of coagulation/ flocculation and electron ...
متن کاملFormation of Pt–Zn Alloy Nanoparticles by Electron-Beam Irradiation of Wurtzite ZnO in the TEM
As is well documented, platinum nanoparticles, promising for catalysts for fuel cells, exhibit better catalytic activities, when alloyed with Zn. Pre-existing syntheses of Pt-Zn alloy catalysts are composed of a number of complex steps. In this study, we have demonstrated that nanoparticles of Pt-Zn alloys are simply generated by electron-beam irradiation in a transmission electron microscope o...
متن کاملذخیره در منابع من
با ذخیره ی این منبع در منابع من، دسترسی به آن را برای استفاده های بعدی آسان تر کنید
ژورنال
عنوان ژورنال: Applied Physics Letters
سال: 1984
ISSN: 0003-6951,1077-3118
DOI: 10.1063/1.95157